ProTec Carrier Systems GmbH is a young, highly innovative company specialized in the development and production of systems and components for the transport as well as processing of thin/ultra-thin substrates. These applications are designed for the display and semiconductor industries in form of the Transfer ElectroStatic Carrier (T-ESC) Technology.
Advanced process steps and materials require additional glass support in order to work reliably. Thus, based on using electrostatic force the T-ESC Technology is perfectly suited to accomplish such a support in an economical and ease to use way. The glass substrate can be fixed within 3 seconds, no particles are generated on the critical surface and the glass is relieved from the rigid T-ESC in 3 seconds again.
Furthermore, clamping of thin foils (roll-to-roll & sheet-to-sheet) for e.g. OLED or flexible Displays applications will improve yield due to handling and process benefits such as cooling possibilities, especially in vacuum processes.
ProTec offers customized processing and handling solutions based on its electrostatic clamping technology. Customers can choose between stationary systems integrated in existing tools (cluster based) and fully mobile solutions for inline processing. Our unique electrostatic clamping systems always consist of an electrostatic chuck and a controller unit.
• Various materials starting from polymer solutions up to high heat resistive ceramics
• Sizes from small 50x90 mm up to larger versions 750x650 mm, even a Gen8 version is possible to clamp large glass sheets without shading
• Stationary high voltage controller with integrated measurement and control functions
• Fully mobile vacuum suited high voltage controller enables demanding inline clamping solutions
Our systems work reliably in a broad range of processes like Plasma Coating, Optical Bonding, OLED evaporation and generates greatest benefit especially in handling thin glass or flexible substrates.
ProTec Carrier Systems GmbH
Birlenbacher Str. 19 – 21
Phone: +49 271 89041-0
Fax: +49 271 89041-19
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